In-situ microscale through-silicon via strain measurements by synchrotron x-ray microdiffraction exploring the physics behind data interpretation

نویسندگان

  • Xi Liu
  • Paragkumar A. Thadesar
  • Christine L. Taylor
  • Hanju Oh
  • Martin Kunz
  • Nobumichi Tamura
  • Muhannad S. Bakir
  • Suresh K. Sitaraman
  • George W. Woodruff
چکیده

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تاریخ انتشار 2014